Piezoelectric microcantilever sensors (PEMSs) consisting of a piezoelectric layer bonded to a nonpiezoelectric layer offer the advantages of electrical self-actuation and self-detection. Here we report PEMSs 60–300μm in length fabricated from 1.5-μm-thick sol-gel PbZr0.53Ti0.47O3 (PZT) films with a 2μm grain size, a dielectric constant of 1600, and a saturation polarization of 55±5μC∕cm2. The PEMSs exhibited up to four resonance peaks with quality factors Q ranging from 120 to 320. In humidity sensing tests, a PEMS with a 60×25μm PZT∕SiO2 section and a 24×20μm SiO2 extension exhibited 1×10−15g∕Hz mass sensitivity, two orders of magnitude better than the sensitivity of the current PZT PEMS.
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Zuyan et al. (2006) studied this question.