Microlens arrays for Shack–Hartmann wavefront sensors were fabricated by field-assisted silver ion migration in glass with subsequent annealing in order to increase fill factor without degrading the optical properties of arrays. The theoretical model which describes the dependence of the parameters of microlenses in a matrix on a technological process of lens fabrication was made. The technological conditions for making microlens arrays with a wide range of optical parameters for measuring various wavefront distortions are selected.
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Vekshin et al. (2010) studied this question.
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