An Integrated LTCC Inductor Embedding NiZn Ferrite

An integrated inductor using the low-temperature cofired ceramics (LTCC) technology for low-power electronics was fabricated. In the inductor, NiZn ferrite sheet (muR=230) was embedded to increase inductance. The inductor has Ag spiral coil with 14 turns (seven turns times two layers), a dimension of 0.6 mm in width, 10 mum in thickness, and 0.15 mm in pitch. To evaluate the inductance, including the parasitic resistance, the fabricated inductor was simulated and measured. It was confirmed that simulated values were very close to the measured values. Finally, the maximum quality factor of 20.53 was obtained at 5 MHz for the inductor