Using the technique of capacitance micrometry it is possible to measure very small displacements. The authors describe the application of this technique to the control of piezo-scanned Fabry-Perot etalons using a closed-loop feedback system. This system removes the problem of the nonlinear response and hysteresis associated with piezoelectric transducers and allows precise control of both etalon gap and parallelism.
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Hicks et al. (1984) studied this question.
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