Single Crystalline Germanium Island on Insulator by Zone Melting Recrystallization

Single crystalline germanium islands on insulator have been formed by zone melting with graphite strip heaters. Two types of geometrical patterns for islands, a series of rectangles with 100 µm × 80 µm sides connected with a narrow stripe 30 µm × 10 µm and an isolated island (250 µm × 100 µm) with a peaked side, were successfully used to obtain large single crystalline islands. Most islands were found to be single crystal and the predominant orientation was <100>. Electron concentrations of 10 16 -10 18 /cm 3 with Hall mobility of 3×10 3 -10 3 cm 2 /Vsec were obtained for single crystalline germanium islands.