Porous Al 2 O 3 films exhibit interesting humidity-sensitive electrical properties. The authors have found that the conventional electrical equivalent circuit approach to interpret the properties of an Al 2 O 3 humidity sensor is inadequate. This paper discusses the shortcomings of the model and proposes a theory based on physical adsorption phenomena, surface conduction mechanisms and the dielectric properties of the Al 2 O 3 film. It is shown that the capacitance and resistance characteristics of the sensor derived by the theory agree with the experimental characteristics both in the nature of the variation and the frequency dependence.
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Nahar et al. (1984) studied this question.
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