Structure of Ti–Fe Alloy Films Prepared by Composite-Cathode Sputtering

Films of the binary alloy Ti x Fe 1- x (0< x <1) of uniform composition, from 500 Å to 1 µm thick, were prepared by d.c. sputtering with a composite cathode containing a Ti plate and Fe wires, or an Fe plate and Ti wires. Analyses of the films by EPMA and Auger electron spectroscopy showed that the composition was uniform over an area of about 20×20 mm 2 . X-ray and electron diffraction analyses of the the films showed the existence of amorphous phases at 0.05< x <0.30, 0.35< x <0.50 and 0.55< x <0.83 and a β-Ti (b.c.c.) phase at 0.80< x <0.94, in addition to an α-Fe (b.c.c.) phase at 0< x <0.30, a TiFe 2 (hexagonal) Laves phase at 0.25< x <0.35, a TiFe (CsCl type) phase at 0.45< x <0.55 and an α-Ti (h.c.p.) phase at 0.83< x <1.