Chemical-mechanical polishing experiments produced optical-quality low-scatter surfaces on single-crystal silicon. An alkaline silica hydrosol slurry and preconditioned pitch laps generated high-quality optically flat surfaces after several hours of polishing. The best results produced a lambda/34 peak-to-peak surface having a 6-A rms surface roughness using bowl-feed polishing and a persuader plate.
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McIntosh et al. (1980) studied this question.
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