We elucidated the secret of water-assisted chemical vapor deposition (CVD) by elucidating the influence of water on the catalysts, through ex situ microscopic and spectroscopic analysis. We unambiguously showed that catalyst deactivation readily occurs due to carbon coating and that water acted to remove this coating and revive catalysts activity. This represents the central point of water-assisted CVD.
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Yamada et al. (2008) studied this question.
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