Fabrication and Microwave Responses of YBa₂Cu₃O7-x Superconducting Thin-Film Nanobridges

Superconducting nanobridges with a width smaller than 150 nm were patterned by electron beam/ultraviolet (EB/UV) hybrid exposure technique in YBa 2 Cu 3 O 7- x (YBCO) thin films. There was no significant decrease in transition temperature and critical current density compared with unstructured films. For a 120-nm-wide nanobridge, as high as 150 µA critical current was obtained at 77 K.