Unique Method of Patterning Superconducting Thin Films by Selective Growth of Y–Ba–Cu–O

A new method of patterning superconducting thin films by the selective growth of YBaCuO has been developed. Films deposited on MgO substrates are superconductive, while films on SiO 2 films have the insulative properties. The results of X-ray diffraction and Auger electron spectroscopy analyses show that the insulative properties are due to the intermixing of YBaCuO films and SiO 2 films. A superconducting line of 15 µm wide has the transition temperature of zero resistance at 72 K and the critical current density of 3.26×10 6 A/cm 2 at 4.2 K.