Synthesis and Characterization of Polymer Brushes on Micromechanical Cantilevers

Summary: A technique to cover microelectromechanical systems (MEMS), such as micromechanical cantilever (MC) sensors, with a covalently bound brush layer has been developed. The polymer layer was grown using a “grafting‐from” synthesis of polymer brushes under mild conditions, by surface‐initiated atom transfer radical polymerization. Atomic force microscopy (AFM) and ellipsometry have revealed a uniform thickness of about 12 nm from which a grafting density of polymer brushes of 0.19 chains · nm −2 was estimated. The coating with polymer brushes can be realized on a selected surface. It was shown that a single‐sided brush layer swells reversibly in toluene, resulting in a bending of the micromechanical cantilever. Schematic representation of the PMMA brush synthesis on the MC surface, by surface‐initiated ATRP. magnified image Schematic representation of the PMMA brush synthesis on the MC surface, by surface‐initiated ATRP.