Infrared spectroscopic ellipsometry (IRSE) and X‐ray photoelectron spectroscopy (XPS) monitoring the preparation of maleimide‐functionalized surfaces: from Au towards Si (111)

The IR ellipsometric technique was used to identify the surface species and to control the preparation of maleimide‐terminated surfaces. Because of higher s / n ratios for metallic substrates, the protocol was initially developed on Au surfaces, was later successfully transferred to technologically more relevant Si (111) substrates. The functionalized surfaces were achieved by electrochemical deposition of diazonium linker films and following chemical adsorption steps. Complementary XPS was also employed to detect the surface species in the process of preparation. The immobilization of different functional molecules was proven by interpreting the specific vibrational bands in IR spectra and additionally confirmed by XPS experiments. The surface homogeneity was investigated by FT‐IR synchrotron mapping ellipsometry. This work shows that the proposed protocol is an effective pathway to achieve the desired functionalized surfaces.