A comparison between the performance of conductometric and layered surface acoustic wave (SAW) hydrogen sensors is presented. Both sensor structures employ an RF magnetron sputtered tungsten trioxide (WO 3 ) thin film as a selective layer for hydrogen (H 2 ) sensing applications. The conductometric device is based on an alumina substrate, while the layered SAW device structure is fabricated on a 36° Y-cut, X-propagating LiTaO 3 substrate with a zinc oxide (ZnO) guiding layer. The sensors were investigated for different operational temperatures and concentrations of H 2 ranging between 0.06 and 1% in synthetic air. Approximately 1.4 µA current and 27 kHz frequency shifts were observed towards 1% H 2 in air for the conductometric and layer SAW device, respectively.
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Ippolito et al. (2005) studied this question.
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