Near-field laser parallel nanofabrication of arbitrary-shaped patterns

The authors present a simple and efficient technique for laser writing of arbitrary nanopatterns across a large surface area without using projection masks. It is based on the unique near-field focusing effect of a self-assembled particle array on the surface interacting with an angular incident laser beam. The spot resolution can be down to 80nm. More than 6×106 nanolines and c-shaped uniform patterns were fabricated simultaneously over an area of 5×5mm2 by a few laser shots.