SrBi 2 Ta 2 O 9 films were deposited on single crystal LaSrAlO 4 (110) substrates by pulsed laser deposition at various growth temperatures and were characterized using x-ray diffraction (XRD), atomic force microscopy (AFM) and transmission electron microscopy (TEM). XRD measurement and TEM observations revealed that the films were highly epitaxial and were fully a -/ b -axis oriented with excellent in-plane alignment with the substrate. AFM showed that films possessed a very smooth surface with RMS roughness of the order of 2-3 nm.
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Garg et al. (2002) studied this question.