Understanding the thermal budget of perpendicular materials is crucial for the potential application perpendicular magnetic tunnel junctions. In this paper, we study the effects of high-temperature rapid thermal annealing on the structural and magnetic properties of ultra-thin Co/Pd multilayers deposited at room temperature. It is shown that perpendicular magnetic anisotropy of ultra-thin Co/Pd multilayers improves with increasing annealing temperature up to 425 °C. This property of ultra-thin Co/Pd multilayers provides increased thermal budgets for CMOS-integrated magnetic devices.
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Gottwald et al. (2013) studied this question.
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