Molybdenum, tungsten, titanium, 10 wt% titanium: tungsten, and tantalum are evaluated as barrier metals for preventing gallium and zinc out-diffusion from alloyed p-GaP/Au:Zn contact system. Secondary-ion mass spectrometry is employed to assess qualitatively the extent of out-diffusion. SIMS analysis indicates that effectiveness of barrier metals decreases in the order of 10 wt% Ti:W≳Ta≫W≳Mo≫Ti. Furthermore, specific contact resistances are determined by accounting for both spreading resistance and series resistance. Among the present metallization systems, 10 wt% Ti:W is proved to be the most suitable barrier metal.
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Yamashita et al. (1981) studied this question.
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