Mn-doped monoclinic β-(Ga 1−x Mn x ) ₂ O ₃ thin films were epitaxially grown on α-Al ₂ O ₃ (0001) substrates by alternately depositing Ga ₂ O ₃ and Mn layers using the laser molecular beam epitaxy technique.
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Guo et al. (2014) studied this question.
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