Continuous and scale‐up synthesis of high purity H₂O₂ by safe gas‐phase H₂/O₂ plasma reaction

Significance A new generation of double dielectric barrier discharge (DDBD) reactor featured by a metal powder (MP) high voltage electrode is presented. The MP high voltage electrode not only has excellent homogeneous discharge performance but also has the advantage of without regular maintenance. Therefore, the MP‐DDBD reactor was proved to be suitable for the uninterrupted and safe synthesis of high purity H 2 O 2 aqueous solution with up to 65 wt % concentration from the H 2 /O 2 mixture. The scale‐up synthesis of H 2 O 2 was successfully attempted in an integrated device based on the MP‐DDBD reactor. The future practical H 2 O 2 synthesizer based on the MP‐DDBD reactor will be small and movable, and therefore, be convenient to supply high purity H 2 O 2 on site for small scale users like semiconductor industry.