Depth range of primary electrons, electron beam broadening, and spatial resolution in electron-beam studies

A comparative analysis of the electron range in solids as a function of the initial electron energy (in the range 1–50 keV) and parameters of matter is performed. A relationship between the full length range of electrons and the depth of their penetration into the target material is established using simple empirical relations. The broadening of an electron beam upon its penetration into a material is considered and the spatial resolution of electron-beam instruments (in particular, in the backscattering mode) is determined.