Exit angle dependence of penetration depth of backscattered electrons in the scanning electron microscope

The variation of penetration depth of backscattered electrons with exit angle is investigated by Monte Carlo calculations. It is confirmed that the mean penetration depth of backscattered electrons increases linearly with exit angle. To see qualitatively the extent of penetration of backscattered electrons, trajectories are plotted by selecting the exit angle. Some studies of the Everhart model for electron backscattering are done to calculate the mean penetration depth. The modified model provides a relatively good prediction in comparison with Monte Carlo calculations.