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September 1, 1989Journal of The Electrochemical Society

On the Mechanism of Plasma Oxidation of Polysiloxane

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HNHideo NamatsuNTT (Japan)

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Hideo Namatsu (1989) studied this question.

synapsesocial.com/papers/6a72627ffe4101aa97e0d60ahttps://doi.org/10.1149/1.2097546
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