Photoreactive Fluorinated Polyimide Protected by Tetrahydropyranyl Group(THP) Based on Photoinduced Acidolysis. Properties and kinetics for acidolysis.

We have previously reported on the fluorinated positive type polyimide protected by tert-buthoxycarbonyl group (t-BOC)1). However, this system has some problems from practical point of view. As their examples, the polymer synthetic yield is not sufficient. K+ ion, which may damage to the electronic devices, further exists in the finally obtained polyimide as t-BOC group normally introduces to the hydroxyl polyimide in the presence of potassium tert-butoxide.