Some useful yield estimates for ion beam sputtering and ion plating at low bombarding energies

Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation P. C. Zalm; Some useful yield estimates for ion beam sputtering and ion plating at low bombarding energies. Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena 1 April 1984; 2 (2): 151–152. https://doi.org/10.1116/1.582936 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAVS: Science & Technology of Materials Interfaces and ProcessingJournal of Vacuum Science & Technology B Search Advanced Search |Citation Search