We use a Fourier-space imaging technique relying on outcoupling grating probes to study the coupled mode interaction and dispersion properties of guided modes in silicon-on-insulator codirectional couplers. Our approach allows us to measure the mode splitting inherent to coupled systems, determine the mode symmetry, and locally probe the coupling length with an accuracy of ±50nm. A systematic study of directional couplers with different waveguide widths, coupling gaps, and e-beam exposure doses is reported in order to verify the results across a wider parameter space.
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Jágerská et al. (2008) studied this question.
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