A sub-200 nanometer wide 3D stacking thin-film temperature sensor

We presented a 3D stacking thin-film temperature sensor with a total width down to 140 nm, a temperature resolution of 40–100 mK, and repeatable sensitivities of 9.6 ± 0.7 μV K ⁻¹ and 3.6 ± 0.1 μV K ⁻¹ for Cr/Pd and Au/Pd sensors with varied junction size.