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June 26, 2013Journal of Microelectromechanical Systems

A Glass-in-Silicon Reflow Process for Three-Dimensional Microsystems

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Authors

RHRazi HaqueLawrence Livermore National LaboratoryKWKensall D. WiseUniversity of Michigan

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Haque et al. (2013) studied this question.

synapsesocial.com/papers/6a72ee958ff5ffa3ad748953https://doi.org/10.1109/jmems.2013.2265851
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