Laser crystallization was performed by scanning the substrate through a stationary cw Ar+ laser beam. Amorphous films show two abrupt changes in the optical transmission spectra as a function of laser power. At the first step no grains are observed with 10-nm resolution. The second optical change is accompanied by clear crystallinity with grains from submicron to several 100-μm size.
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Bösch et al. (1982) studied this question.
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