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June 1, 1998Journal of Microelectromechanical Systems

A novel integrated silicon capacitive microphone-floating electrode "electret" microphone (FEEM)

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Authors

QZQuanbo ZouZTZhimin TanDonghua UniversityZWZhenfeng Wang

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Cite This Study

Zou et al. (1998) studied this question.

synapsesocial.com/papers/6a73384dca0cfc242ec23a07https://doi.org/10.1109/84.679385
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Also Consider

Synapse has enriched 2 closely related papers on similar clinical questions. Consider them for comparative context:

  1. 1Subminiature silicon integrated electret capacitor microphone1989 · 42 citations
  2. 2Capacitive microphone with a surface micromachined backplate using electroplating technology1994 · 62 citations