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August 1, 2001Japanese Journal of Applied Physics

Crystalline Defects in InP-to-Silicon Direct Wafer Bonding

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Authors

DPDonato PasquarielloPhilips (Netherlands)MCMartin CamachoFEFredric Ericsson

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Pasquariello et al. (2001) studied this question.

synapsesocial.com/papers/6a73578faa6305455eb86f4dhttps://doi.org/10.1143/jjap.40.4837
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