Study on the Thermal Transient Response of TSV Considering the Effect of Electronic-Thermal Coupling

The transmission performance of TSV considering the effect of electronic-thermal coupling is an new challenge in three dimension integrated circuit. This paper presents the thermal equivalent circuit (TEC) model of the TSV, and discussed the thermal equivalent parameters for TSV. Si layer is equivalent to transmission line according to its thermal characteristic. Thermal transient response (TTR) of TSV considering electronic-thermal coupling effects are proposed, iteration flow electronic-thermal coupling for TSV is analyzed. Furthermore, the influences of TTR are investigated with the noncoupling and considering coupling for TSV. Finally, the relationship among temperature, thickness of SiO₂, radius of via and frequency of excitation source are addressed, which are verified by the simulation.