Tip top: Wear resistant, conductive boron-doped diamond-coated AFM tips enable reliable nanoscale oxidation of hydrogen-terminated silicon with sub-20-nm spatial resolution (see image) and nanopatterning threshold biases as low as 1 V. Despite relatively high currents during nanopatterning, the kinetics are quantitatively consistent with an electric-field-induced mechanism.
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Schmitz et al. (2007) studied this question.
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