Spectral diagnosis of a laser-produced XUV source using a digital camera system with pinhole transmission grating

For spectral diagnosis, a repetitive laser-produced soft-X-ray source was examined in the range 2–40 nm using a spectrometer containing a pinhole transmission grating, an image converter, and a CCD camera. Via digital recording the detection system provides fast on-line data accumulation with spectral and spatial resolution. With this detector the performance of the light source was studied with respect to spectral emission characteristics, long-term stability, and reproducibility by recording spectra for different solid targets and liquid lead.