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Experimental study demonstrates parallelized thermochemical nanolithography using a five-tip array, highlighting faster fabrication of conjugated polymers and graphene nanoribbons.
Parallelization of thermochemical nanolithography Keith M. Carroll; Xi Lu; Suenne Kim; Yang Gao; Hoe Joon Kim; Suhas Somnath; Laura Polloni; SORDAN, ROMAN ; William P. King; Jennifer E. Curtis; Elisa Riedo 2014-01-01 Abstract One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.
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Carroll et al. (2013) studied this question.
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