Mg x Zn 1 − x O -based photodetectors covering the whole solar-blind spectrum range

A series of MgxZn1−xO thin films has been prepared by metalorganic chemical vapor deposition and metal-semiconductor-metal structured ultraviolet photodetectors are fabricated from these films. The cutoff wavelengths of the photodetectors can cover the whole solar-blind spectrum range (220–280 nm) by varying Mg content in the MgxZn1−xO thin films. As a representative, the photodetector fabricated from Mg0.52Zn0.48O shows an ultraviolet/visible rejection ratio of about four orders of magnitude, and the dark current is 15 pA at 10 V bias. These results demonstrate that high-performance photodetectors operating in the whole solar-blind spectrum range can be realized in MgxZn1−xO films.