The oxidation kinetics of a single crystal of SrTiO 3 were measured with a tensivolumetric system over the temperature range 700°–975° at 0.03 atm oxygen pressure. The oxidation was found to be oxygen diffusion limited with an activation energy of 14.9 ± 1.3 kcal / mole . Combining the kinetic data with relative defect concentration data yielded an activation energy for oxygen self‐diffusion of 57 ± 16 kcal / mole . The enthalpy of formation of doubly ionized oxygen vacancies was calculated to be 126 ± 13 kcal / mol .
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Schwarz et al. (1975) studied this question.