Synthesis of Au nanoparticles in partially oxidized Si matrix by atom beam sputtering

Nanocomposite thin films containing Au nanoparticles embedded in a partially oxidized Si matrix were synthesized by the atom beam co-sputtering technique. Transmission electron microscopy studies revealed formation of Au nanoparticles in as-deposited films. The size distribution of Au nanoparticles was tailored by varying the metal fraction in the nanocomposite films. Increasing the metal fraction has been found to result in the formation of Au nanoparticles with a relatively narrower size distribution. The processes involving irradiation with energetic sputtered atoms arriving at the substrate are considered in nucleation and growth of Au nanoparticles at room temperature. The advantages of atom beam sputtering over ion implantation and ion beam mixing are also discussed.