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September 1, 1993Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

α α′ α″ α‴ Poly-tetrafluoro-p-xylylene as an interlayer dielectric for thin film multichip modules and integrated circuits

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SDS. Dabral XZX. Zhang XWXinheng WuChangzhou University

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Dabral et al. (1993) studied this question.

synapsesocial.com/papers/6a7596d187be37a05b160f60 https://doi.org/10.1116/1.586485

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