Modeling Study on the Generation of Reactive Oxygen Species in Atmospheric Radio‐Frequency Helium–Oxygen Discharges

Atmospheric radio‐frequency (rf) plasmas have attracted an increasing amount of attention due to its unparalleled capability for production of chemically reactive oxygen species (ROS). In this paper, we explore a one‐dimensional fluid model, incorporating 17 species and 65 key reactions, to investigate the generation mechanism of ROS in atmospheric He/O 2 rf discharges. From the computational data the atomic oxygen density is almost linearly dependent on the power density and its largest value was observed at the oxygen admixture of 0.6% while altering the oxygen admixture at a constant power density, and an optimal oxygen admixture level of 0.3% is also found to produce the largest density of single delta oxygen (SDO) at a given power density.The dominant production and destruction reactions of ROS are also discussed based on the simulation results. magnified image