High resonance frequency force microscope scanner using inertia balance support

We have developed the atomic force microscope scanner with the high resonance frequency of 540kHz in the z axis using a piezosupport mechanism “inertia balance support.” In the method, a cubic piezoactuator is supported at the four sides perpendicular to the extension axis, by which the resonance frequency of the scanner remains as high as that of the actuator in the free vibration. The scanner allows driving at low voltage ±15V for the practical z scan range of 330nm. We demonstrate the applicability of the scanner to the true-atomic-resolution imaging of mica in liquid.