Nanometer-scale electrochemical lithography on the spinel oxide LiMn2O4

A scheme for nanometer-scale patterning of the surface of a conducting lithium manganese oxide (LiMn2O4) by scanning probe microscopy is described. A significant feature of this work is the demonstration that a localized surface chemical change can be confined to a depth which depends on the oxide-tip voltage bias and ambient humidity. Processing strategies exploiting this localized pattern generation vary from shallow surface property modification to localized etching of the oxide and the formation of nanometer-size pits, wells, or trenches. Unlike the scanning probe based surface oxidation of metals and semiconductors, the electroactive material is altered via electrochemically generated species.