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The carrier transport in AlGaN light emission diode (LED) structures on Si‐substrates including an AlN multilayer (ML) buffer for reduction of defects was investigated using I – V ‐characteristics and admittance spectroscopy. Additionally, AlN on Si ML and AlN/AlGaN:Si on Si structures were grown and analyzed separately. The AlN‐ML/AlGaN:Si heterojunction, and the pn‐junction including the AlGaN/GaN multi quantum well (MQW)‐structure were identified. As the main space charge regions (SCRs) controlling the carrier transport through the ultraviolet‐light emission diode (UV‐LED) structure the Si‐substrate/AlN‐ML heterojunctions pointed out. The I – V ‐characteristic of the LED structure is described by the series resistance of the AlN‐ML and a parallel resistance with respect to the pn‐junction. Interface defect states and/or deep defects impact the series resistance. The carrier transport through the LED structure is controlled by a tunnel process described by a Fowler–Nordheim (FN)‐emission mainly through the AlN‐ML buffer forming the series resistance.
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Witte et al. (2011) studied this question.
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