A New Fabrication Technique for Optoelectronic Integrated Circuits (OEIC's) — The Graded‐Step Process — Applied to the Fabrication of AlGaAs / GaAs PIN/FET and PIN/Amplifier Photoreceivers, Wada, O., Miura, S., Machida, H., Nakai, K., Sakurai, T.
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Wada et al. (1985) studied this question.
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