Scanning-ProbeQuantum Sensing of a Microwave andStatic Magnetic Field Response of an On-Chip Superconducting Resonator

Superconducting resonators are finding increasing applications in designing advanced quantum circuits for an ongoing sensing, metrology, and computing technological revolution. A detailed knowledge of the microscopic electromagnetic properties of superconducting resonators is directly relevant for their further improvements on circuitry design and device performance. Here, we introduce scanning-probe quantum microscopy to report nanoscale sensing of the microwave and static magnetic field environment of an on-chip niobium (Nb) superconducting resonator. Taking advantage of Rabi oscillation measurements, we show that microwave magnetic fields generated by the superconducting resonator mode can be utilized to achieve coherent control of a quantum spin sensor. We further visualize the static electromagnetic field response of the Nb resonator, showing magnetic field-induced formation, evolution, and depinning of superconducting vortices. Our results provide insights into future design, testing, and evaluation of solid-state superconducting resonators, highlighting the potential of quantum sensors as a local probe to investigate electromagnetic properties of superconducting quantum circuits.