Ballistic glancing angle deposition of inclined Ag nanorods limited by adatom diffusion

The growth dynamics of 1D nanorods (NRs) composed of noble metals is ambiguous during glancing angle deposition (GLAD). The continuum equation (CE) model describes ballistic deposition limited by adatom diffusion, not verified in GLAD of noble metal NRs. In this work, GLAD is operated at Ts (substrate temperature) below room temperature to create inclined Ag NRs, and the CE fits the growth orientation of NRs with deposition angles at fixed Ts well. The CE fitting evaluates the diffusion activation energy (Ed) as 0.23 eV, showing that Ag NRs are poly-crystalline with dominant (111), as confirmed by XRD. This work introduces an effective approach to study the growth thermodynamics of 1D nanostructures and evaluate the Ed of adatoms with relatively low melting points.