High‐speed atmospheric atomic layer deposition of ultra thin amorphous TiO₂ blocking layers at 100 °C for inverted bulk heterojunction solar cells

Ultrafast, spatial atmospheric atomic layer deposition, which does not involve vacuum steps and is compatible with roll‐to‐roll processing, is used to grow high quality TiO 2 blocking layers for organic solar cells. Dense, uniform thin TiO 2 films are grown at temperatures as low as 100 °C in only 37 s (~20 nm/min growth rate). Incorporation of these films in P3HT‐PCBM‐based solar cells shows performances comparable with cells made using TiO 2 films deposited with much longer processing times and/or higher temperatures.