Carbon‐MEMS‐Based Alternating Stacked MoS₂@rGO‐CNT Micro‐Supercapacitor with High Capacitance and Energy Density

A novel process to fabricate a carbon‐microelectromechanical‐system‐based alternating stacked MoS 2 @rGO–carbon‐nanotube (CNT) micro‐supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin‐coating of MoS 2 @rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS 2 @rGO and CNTs are embedded in the carbon microelectrodes, which cooperatively enhance the performance of the MSC. The fabricated MSC exhibits a high areal capacitance of 13.7 mF cm −2 and an energy density of 1.9 µWh cm −2 (5.6 mWh cm −3 ), which exceed many reported carbon‐ and MoS 2 ‐based MSCs. The MSC also retains 68% of capacitance at a current density of 2 mA cm −2 (5.9 A cm −3 ) and an outstanding cycling performance (96.6% after 10 000 cycles, at a scan rate of 1 V s −1 ). Compared with other MSCs, the MSC in this study is fabricated by a low‐cost and facile process, and it achieves an excellent and stable electrochemical performance. This approach could be highly promising for applications in integration of micro/nanostructures into microdevices/systems.