A high-power electrostatic motor using skewed electrodes

This paper describes a new type of high-power electrostatic motor equipped with skewed electrodes. The authors have developed several types of high-power electrostatic motors. Among them, the dual excitation multiphase electrostatic drive (DEMED) has the best performance in terms of power. Its power/weight ratio is almost the same as that of the most advanced conventional electromagnetic motors. However, DEMED exhibits a large force ripple leading to such disadvantages as low controllability, high noise, and vibration. To overcome these disadvantages, the authors have proposed to apply the skew technique to DEMED and have analyzed the effects of skewing the electrodes. The analysis has shown that appropriate skewing can reduce the force ripple considerably. In this paper, we further analyze the shape of the electrodes. A new type of motor incorporating the results of the analysis is fabricated and tested. Using the new DEMED with skewed electrodes (V-DEMED), the slider motion becomes much smoother, noise and vibration are reduced, and efficiency improves, without compromising the thrust force.