X-ray microprobing is used to investigate buried elastic strain resulting from deep He+ implantantion in LiNbO3. The implantation regions are defined lithographically and strain fields mapped with spatial- and energy-resolved x-ray microdiffraction to characterize the resulting structures. The structurally modified regions are found to retain their lateral lithographic definition, with the buried implantation being in strong compression.
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Djukic et al. (2007) studied this question.
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